[29a-G19-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[29a-G19-1] Annealing effects of impurities-doped ZnO films using DEZ solution by spray method

^○Akiko Ide¹, Ayako Nagano¹, Minoru Oshima¹, Kenji Yoshino^1,3, Yujin Takemoto², Koji Toyota², Koichro Inaba², Ken-ichi Haga², Toshio Naka², Kohichi Tokudome² (Univ. Miyazaki¹, Tosoh Finechem², JST-CREST³)

Keywords:ZnO、透明導電膜、スプレー