[29a-PB4-1~9] 9.4 Thermoelectric conversion

[29a-PB4-7] Thermo-electronic properties of Mg2Si thin films grown by rf sputtering

^○（M1）Yoshinori Hayashi¹, Yukihiro Morita^1,2, Mikihiko Nishitani^1,2, Tetsusei Kurashiki¹ (Osaka Univ.¹, Panasonic Corp.²)

Keywords:熱電変換、マグネシリサイド、RFスパッタ