[29p-B9-5] ▲Analysis of Plasma Potential in Photoemission-Assisted Plasma Used for Dry Planarization Process
Keywords:Photoemission-Assisted plasma、Surface planarization process、Langmuir probe
Presentation information
Regular sessions(Oral presentation)
08. Plasma Electronics » 8.6 General plasma phenomena, emerging area of plasmas and their new applications
[29p-B9-1~7] 8.6 General plasma phenomena, emerging area of plasmas and their new applications
Fri. Mar 29, 2013 1:30 PM - 3:15 PM B9 (K2 4F-1407)