[29p-F2-1~19] 6.3 Oxide-based electronics

[29p-F2-1] △Physical properties of indium oxynitride (InO_xN_y) epitaxial thin films

^○Sohei Okazaki^1,2, Yasushi Hirose^1,2,3, Shoichiro Nakao^1,2, Chang Yang^1,2,3, Atsushi Suzuki^1,2,3, Daichi Oka^1,2,3, Tetsuya Hasegawa^1,2,3 (KAST¹, JST-CREST², Univ. of Tokyo³)

Keywords:酸窒化物、透明導電体