[29p-G19-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[29p-G19-4] Existence of Nano-Crystals in IGZO Thin Film

^○Masahiro Takahashi¹, Takuya Hirohashi¹, Masashi Tsubuku¹, Masashi Oota¹, Shunpei Yamazaki¹ (Semiconductor Energy Laboratory¹)

Keywords:IGZO、電子線回折