[29p-G20-3~20] 15.3 III-V-group epitaxial crystals

[29p-G20-20] Selective growth of GaN by RF-radical source MBE

^○Hironao Kato¹, Takenori Iwatsuki¹, Nao Yamamoto¹, Yuya Shirai¹, Yujiro Hirota¹, Hiromu iha¹, Shigeya Naritsuka¹, Takahiro Maruyama¹ (Meijo Univ¹)

Keywords:選択成長