[29p-PA9-1~23] 16.3 Bulk, thin-film and other silicon-based solar cells

[29p-PA9-4] A study on texturing process for diffused layers of multi-crystalline silicon solar cells using chlorine trifluoride(Ⅱ)

Akira Kubota¹, Sigeto Iwama¹, ^○Ryosuke Watanabe¹, Yoji Saito¹ (Seikei Univ.¹)

Keywords:太陽電池、テクスチャリング、ドライエッチング