[29p-PB1-4] Humidification effect of annealing gas on quality of silicone-oil Si oxide film
Keywords:酸化Si薄膜
Presentation information
Regular sessions(Poster presentation)
13. Semiconductors A (Silicon) » 13.3 Insulator technology
[29p-PB1-1~20] 13.3 Insulator technology
Fri. Mar 29, 2013 1:30 PM - 3:30 PM PB1 (2nd gymnasium)