[30a-D3-1~13] 6.6 Probe microscopy

[30a-D3-9] Characterization of Electrical Property of Metal Coated Carbon Nanofiber Probes

^○Shihomi Tanaka¹, Koji Saida¹, Masashi Kubota¹, Soichiro Matsui¹, Masaki Tanemura¹, Masashi Kitazawa², Ryo Ohta² (Nagoya Inst. Technol.¹, Olympus Co. Ltd.²)

Keywords:カーボンナノファイバー、カンチレバー