[30a-G6-1~11] 13.4 Interconnection technology

[30a-G6-11] △Fabrication of Unidirectional Optical Coupler for Opto-Electronic 3-D LSI

^○Akihiro Noriki¹, Kang-Wook Lee², Jicheol Bea², Takafumi Fukushima², Tetsu Tanaka^1,3, Mitsumasa Koyanagi² (Dept. of Bioengineering and Robotics, Tohoku Univ.¹, New Industry Creation Hatchery Center (NICHe), Tohoku Univ.², Dept. of Biomedical Engineering, Tohoku Univ.³)

Keywords:三次元LSI、光配線、光電子集積