[30a-G6-1~11] 13.4 Interconnection technology

[30a-G6-3] Nanoscale Investigation on Corrosion of Copper Wire in Dilute Electrolyte Solution by Atomic Force Microscopy

^○Shoichiro Ogata¹, Naritaka Kobayashi¹, Chikako Takatoh², Shohei Shima², Akira Fukunaga², Hitoshi Asakawa³, Takeshi Fukuma^1,3 (Dept. of Eng., Kanazawa Univ¹, Ebara Corporation², Bio-AFM Research Center, Kanazawa Univ³)

Keywords:原子間力顕微鏡、腐食