The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.4 Interconnection technology

[30p-G6-1~6] 13.4 Interconnection technology

Sat. Mar 30, 2013 1:30 PM - 3:00 PM G6 (B5 1F-2106)

[30p-G6-3] Reaction analysis of Co-CVD process using Co amidinate precursor for liner layer application

Yudai Suzuki1, Hideharu Shimizu1, Takeshi Momose1, Yukihiro Shimogaki1 (The Univ. of Tokyo1)

Keywords:コバルト、アミディネート、コバルトCVD