[At-4] CRESTEC CORPORATION
CRESTEC is going to introduce its new model, the CABL-UH series which has realized world hightest level acceleration voltage 130kV. We will also present our highly-estimated Electron Beam Lithography System CABL-9000C. This model has realized a beam spot size 2nm, the finest line width 536mm and a stitching accuracy 10nm.
Web site, SNS