Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-A19-1~14] 13.3 Si Process・Interconnect・MEMS・Integration

Thu. Sep 18, 2014 2:00 PM - 5:45 PM A19 (E311)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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Lunch 12:30～14:00 (12:30 PM - 2:00 PM)

2:00 PM - 2:15 PM

△ [18p-A19-1] Uncooled infrared sensors with using one dimensional plasmonic metamaterials for polarization selective function

^○(M2)Yosuke Takagawa¹, Shinpei Ogawa², Kyohei Masuda¹, Koichi Miyashita¹, Masafumi Kimata¹ (Ritsumeikan Univ¹, Mitsubishi Electric Corp²)

2:15 PM - 2:30 PM

[18p-A19-2] High-performance three-dimensional plasmonic metamaterial absorbers for uncooled infrared sensors with advanced functions I

^○Shinpei Ogawa¹, Daisuke Fujisawa¹, Hisatoshi Hata¹, Mitsuharu Uetsuki¹, Koji Misaki¹, Masafumi Kimata² (Mitsubishi Electric Corp.¹, Ritsumeikan Univ.²)

2:30 PM - 2:45 PM

[18p-A19-3] High-performance three-dimensional plasmonic metamaterial absorbers for uncooled infrared sensors with advanced functions II

^○Daisuke Fujisawa¹, Shinpei Ogawa¹, Hisatoshi Hata¹, Mitsuharu Uetsuki¹, Koji Misaki¹, Masafumi Kimata² (Mitsubishi Electric Corp.¹, Ritsumeikan Univ.²)

2:45 PM - 3:00 PM

[18p-A19-4] Sensitivity improvement of a pyroelectric infrared sensor by a thinned metallization layer

^○(M1)Shota Yonemaru¹, Koji Oishi¹, Daisuke Akai^1,2, Makoto Ishida^1,2 (Toyohashi Tech.¹, EIRIS, Toyohashi Tech.²)

3:00 PM - 3:15 PM

△ [18p-A19-5] Surface-plasmon-based flexible color film using Al nano periodic structures

^○(B)Hayato Kumagai¹, Hiroaki Honma¹, Kazuhiro Takahashi¹, Makoto Ishida¹, Kazuaki Sawada¹ (Toyohashi Univ.¹)

3:15 PM - 3:30 PM

[18p-A19-6] Self-oscillation system with thin-film PZT MEMS bimorph cantilevers

^○(M2)Junichi Inoue¹, Takafumi Matsuda¹, Kensuke Kanda¹, Takayuki Fujita¹, Kazusuke Maenaka¹ (Univ.Hyogo¹)

3:30 PM - 3:45 PM

[18p-A19-7] PZT thin film deposition on a Si 3D substrate

^○(M1)Shingo Moriue¹, Junichi Inoue¹, Kensuke Kanda¹, Takayuki Fujita¹, Kazusuke Maenaka¹ (Univ.of.Hyogo¹)

3:45 PM - 4:00 PM

[18p-A19-8] Silicon photovoltaic cells coupled with solar-pumped lasers

^○Yasuhiko Takeda¹, Hideo Iizuka¹, Tadashi Ito¹, Shintaro Mizuno¹, Kazuo Hasegawa¹, Tadashi Ichikawa¹, Hiroshi Ito¹, Tsutomu Kajino¹, Kazuo Higuchi^1,2, Akihisa Ichiki², Tomoyoshi Motohiro² (Toyota Central R&D Labs.¹, Nagoya Univ.²)

Break 16:00～16:15 (4:00 PM - 4:15 PM)

4:15 PM - 4:30 PM

[18p-A19-9] Vertically integrated extracellular microprobe array with buffer amplifiers

^○(M1)hiroki makino¹, kouhei asai¹, masanori tanaka¹, makoto isada^1,2, takeshi kawano¹ (Toyohashi Tech.¹, EIIRIS.²)

4:30 PM - 4:45 PM

[18p-A19-10] Integration of metal/silicon dioxide microtube and glass pipette neuroprobe arrays

^○(M1)Tomoyuki Matsuo¹, Tomohiko Nakamura¹, Masahiro Sakata¹, Shouta Yamagiwa¹, Hiroto Sawahata¹, Makoto Ishida^1,2, Takeshi Kawano¹ (Toyohashi Tech.¹, EIIRIS²)

4:45 PM - 5:00 PM

△ [18p-A19-11] PDMS-made Bacteria Trapping Chip Using Beads -Time Dependence of Fluorescence Intensity-

^○Yusuke Nishimura¹, Ryuhei Hayashi¹, Hirokazu Nakazawa¹, Makoto Ishida¹, Kazuaki Sawada¹, Hiromu Ishii¹, Katsuyuki Machida^2,3, Kazuya Masu², Shinichi Yoshida⁴, Mitsumasa Saito⁴ (Toyohashi Univ. of Technology¹, Tokyo Institute of Technology², NTT-AT³, Graduate School of Medical Sciences, Kyushu Univ.⁴)

5:00 PM - 5:15 PM

△ [18p-A19-12] Mesh-like silicon tactile imager with integrated thermal conductivity sensor for realization of material discrimination

^○Ryota Osugi¹, Yusuke Takagi¹, Yusaku Maeda¹, Kyohei Terao¹, Takaaki Suzuki¹, Husao Shimokawa¹, Hidekuni Takao¹ (Kagawa University¹)

5:15 PM - 5:30 PM

[18p-A19-13] Proof Mass Formation Using Cu-Electroplating For Piezoelectric MEMS Vibration Energy Harvesters

^○Shuichi Murakami¹, Kento Kariya², Takeshi Yoshimura², Takayuki Nagataki¹, Takuo Nakade¹, Kazuo Satoh¹, Norifumi Fujimura² (TRI-Osaka¹, Osaka Pref. Univ.²)

5:30 PM - 5:45 PM

[18p-A19-14] Wafer level vacuum packaging by anodic bonding with aluminum thin film

^○Satoshi Karasawa¹, Takeshi Sugiyama¹, Tange Yoshihisa¹, Hideshi Hamada¹, Yoshifumi Yoshida¹ (Seiko Instruments Inc.¹)