Lunch 12:00~13:15 (12:00 PM - 1:15 PM)
Session information
Oral presentation
08. Plasma Electronics » 8.1 Plasma production and control
[19p-S8-1~5] 8.1 Plasma production and control
Fri. Sep 19, 2014 1:15 PM - 2:30 PM S8 (S8)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
1:15 PM - 1:30 PM
○Takuya Kobatake1, Masanori Deguchi1, Junya Suzuki1, Koji Eriguchi1, Kouichi Ono1 (Kyoto Univ.1)
1:30 PM - 1:45 PM
△ [19p-S8-2] Optimization of Cylindrical Cavity Excitation for Large-Area Microwave Plasma Generation
○(B)Yuichi Hasegawa1, Daisuke Ogawa1, Keiji Nakamura1, Satoru Kobayashi2, Hideo Sugai3 (Chubu Univ1, Applied Materials2, NISRI3)
1:45 PM - 2:00 PM
○Kohei Osuga1, Haruo Shindo1, Masao Isomura1,2 (Tokai Univ. Graduate School of Engineering1, Tokai Univ. School of Engineering2)
2:00 PM - 2:15 PM
○(D)Yudai Minagawa1, Naoki Shirai1, Satoshi Uchida1, Fumiyoshi Tochikubo1 (Tokyo Metro. Univ.1)
2:15 PM - 2:30 PM
○Masaru Miyashita1, Haruhiko Etoh1, Yasushi Aoki1, Takanori Kato1 (SHI1)