^○Michiko Yoshitake¹ (NIMS¹)

^○Osamu Nishikawa¹, Masahiro Taniguchi² (Kanazawa Inst. Technol.¹, Kanazawa Inst. Technol.²)

^○Hiroshi Kurokawa¹, Katsunari Muraoka², Yurie Miyazono³, Sonoko Umemura⁴, Yasuyuki Nakagawa⁵ (Ryoden Kasei CO.¹, Ryoden Kasei CO.², Ryoden Kasei CO.³, Mitsubishi Electric CO.⁴, Mitsubishi Electric CO.⁵)

^○Soichiro Hanashiro¹, Osamu Higa¹, Katsuya Higa¹, Sigeru Itho¹ (OkNCT¹)

^○Takashi Uchida¹, Akihito Matsushita¹, Takashi Tachiki¹ (National Defense Academy¹)

^○Takayoshi Kiguchi¹, Oi Lun Li², Nagahiro Saito^1,2,3 (Institute of Innovation for Future Society, Nagoya Univ.¹, Graduate School of Engineering, Nagoya Univ.², Green Mobility Collaborative Research Center, Nagoya Univ.³)

^○Masatosi Kozaki¹, Nobuhiko Nagashima¹, Akihiro Ikeda¹, Hisao Kuriyaki¹, Kiyoshi Toko¹ (ISEE, Kyushu Univ.¹)

^〇R. M. Thushara Damayanthi¹, Satoru Mima¹, Chiko Otani¹, Noboru Furukawa¹, Osamu Tajima² (RIKEN¹, KEK²)

^○Sumio Okuyama¹, Hiroshi Ozaki¹, Koichi Matsushita¹ (Yamagata Univ.¹)

^○Kensuke Akiyama^1,4, Yoshiaki Hara², Ryo Takahashi¹, Masaharu Yoshimizu³, Hiroshi Funakubo⁴, Hiroshi Irie³, Yoshihisa Matsumoto¹ (Kanagawa Ind. Tech. Cen.¹, Ibaraki Nat. Coll. Tech.², Univ. Yamanashi³, Tokyo Inst. Tech.⁴)

^○Makoto Yamaguchi¹, Tomomi Kozu^2,4, Masayuki Fujitsuka³, Ken Nishida⁴ (Akita Univ.¹, Renishaw², JSPMI³, NDA⁴)

^○Takuro Tsuruoka¹, hiroshi Okano¹, Tetsuya Yuki², Shinya Misaki², Toshihiro Hosokawa² (NIT, Kagawa College at Takamatsu¹, TOYO TANSO²)

^○Tatsuro Endo¹, Hiroshi Kajita², Kenji Sueyoshi¹, Satoru Tanaka², Hideaki Hisamoto¹ (Osaka Prefecture Univ.¹, SCIVAX Co., Ltd.²)

^○Akihiro Matsutani¹, Fumitaka Ishiwari², Yoshiaki Shoji², Takuya Uehara³, Masaru Nakagawa³, Takanori Fukushima^2,4 (Semiconductor and MEMS Processing Center, Tokyo Tech¹, Chem. Res. Lab., Tokyo Tech², IMRAM, Tohoku Univ.³, JST-ERATO⁴)