11:45 AM - 12:00 PM
[17a-A14-10] Non-destructive Inspection of Groove Patterns Etched on Inner Surfaces of Fine Pipes
Keywords:内面露光,非破壊観察
Oral presentation
07. Beam Technology and Nanofabrication » 7.3 Lithography
Wed. Sep 17, 2014 9:00 AM - 12:30 PM A14 (E305)
11:45 AM - 12:00 PM
Keywords:内面露光,非破壊観察