The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[17a-A14-1~12] 7.3 Lithography

Wed. Sep 17, 2014 9:00 AM - 12:30 PM A14 (E305)

11:45 AM - 12:00 PM

[17a-A14-10] Non-destructive Inspection of Groove Patterns Etched on Inner Surfaces of Fine Pipes

○Nozomi Kimura1, Toshiyuki Horiuchi1 (Tokyo Denki Univ.1)

Keywords:内面露光,非破壊観察