[17a-A14-1~12] 7.3 Lithography

△ [17a-A14-8] Development of Simple projection Exposure System and Fabrication of Flow Path Patterns with Vertical Sidewalls

^○Yuhta Morizane¹, Syunsuke Uchino², Yuhsuke Watanabe², Toshiyuki Horiuchi^1,2 (Tokyo Denki Univ¹, Tokyo Denki Univ²)

Keywords:流路