[17a-A27-1~11] 14.3/15.4 Code-sharing session

[17a-A27-9] Preliminary study on the fabrication of transferred-substrate InP HBTs using surface activated bonding

^○Yuta Shiratori¹, Norihide Kashio¹, Kenji Kurishima¹, Takuya Hoshi¹, Eiji Higurashi², Hideaki Matsuzaki¹ (NTT Photonics Laboratories¹, Univ. of Tokyo²)

Keywords:InP,HBT,表面活性化接合