[17a-A6-1~9] 6.5 Surface physics and vacuum

[17a-A6-6] Time-resolved Observation of Molecular Adsorbed Oxygen at Si(100)-2×1 Surface using Real-time Synchrotron Radiation Photoelectron Spectroscopy

^○Akitaka Yoshigoe¹, Ryuta Okada^1,2, Yuden Teraoka^1,3, Yutaro Iwai³, Yoichi Yamada², Masahiro Sasaki² (JAEA¹, Univ. of. Tsukuba², Univ. of Hyogo³)

Keywords:吸着,酸化,シリコン表面