[17a-A8-1~7] 6.2 Carbon-based thin films

[17a-A8-1] High-rate homoepitaxial growth of diamond (100) films by MPCVD using spherical cavity

^○Shunsuke Watanabe¹, Ryusuke Morimoto¹, Daiki Kaneta¹, Norio Tokuda^1,2,3, Hiromitsu Kato^2,3, Hitoshi Umezawa^2,3, Satoshi Yamasaki^2,3, Osamu Ariyada⁴, Takao Inokuma¹ (Grad. School of Natural Sci. & Tech. Kanazawa Univ.¹, AIST², JST,CREST³, Arios Inc⁴)

Keywords:ダイヤモンド,高速成長,MPCVD