[17a-A8-1~7] 6.2 Carbon-based thin films

△ [17a-A8-4] Highly-oriented heteroepitaxial diamond films grown on 3C-SiC(001) / Si(001) substrate by antenna-edge microwave plasma CVD

^○Junya Yaita^1,2, Takayuki Iwasaki^1,2,3, Meralys Natal⁴, Stephen Saddow⁴, Mutsuko Hatano^1,2,3 (Tokyo Tech¹, CREST², ALCA³, Univ. of South Florida⁴)

Keywords:ダイヤモンド