The 75th JSAP Autumn Meeting, 2014

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Poster presentation

08. Plasma Electronics » 8.1 Plasma production and control

[17a-PB1-1~8] 8.1 Plasma production and control

Wed. Sep 17, 2014 9:30 AM - 11:30 AM PB1 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB1会場)

9:30 AM - 11:30 AM

[17a-PB1-3] Characteristic Evaluation of VHF-DC Superimposed Magnetron Sputtering System

○Yushi Fukuoka1, Takashi Fukui1, Noriharu Takada2, Kensuke Sasai1, Hirotaka Toyoda1,3 (Nagoya Univ.1, Technical Center, Nagoya Univ.2, PLANT, Nagoya Univ.3)

Keywords:マグネトロンスパッタリング