[17a-PB2-1~18] 8.6 General plasma phenomena, emerging area of plasmas and their new applications

[17a-PB2-2] Selective Heating Phenomenon of Transition Metal by Hydrogen Radical Irradiation and Its Application to Device Fabrication

^○Kazuki Kamimura¹, Tetsuji Arai¹, Keisuke Arimoto¹, Junji Yamanaka¹, Tetsuya Sato¹, Kiyokazu Nakagawa¹, Toshiyuki Takamatsu², Kentarou Sawano³ (Univ. of Yamanashi¹, SST Inc.², Tokyo City Univ.³)

Keywords:水素ラジカル,水素プラズマ加熱,薄膜トランジスタ