The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

16. Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[17a-PB4-1~21] 16.3 Bulk, thin-film and other silicon-based solar cells

Wed. Sep 17, 2014 9:30 AM - 11:30 AM PB4 (Gymnasium2)

ポスター掲示時間9:30~11:30(PB4会場)

9:30 AM - 11:30 AM

[17a-PB4-10] High deposition rate of microcrystalline silicon films (μc-Si) by non-equilibrium plasma CVD

Akihiro Sendo1, Satoshi Nishida1, Hiroshi Muta1, Shizuma Kuribayashi1 (Gifu Univ.1)

Keywords:微結晶シリコン,高速成膜,プラズマ