The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

16. Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[17a-PB4-1~21] 16.3 Bulk, thin-film and other silicon-based solar cells

Wed. Sep 17, 2014 9:30 AM - 11:30 AM PB4 (Gymnasium2)

ポスター掲示時間9:30~11:30(PB4会場)

9:30 AM - 11:30 AM

[17a-PB4-15] Optimization of texturing process for poly-crystalline silicon solar cells using ClF3 plasmaless dry etching

Tomoka Abe1, Yumiko Ichikawa1, Ryosuke Watanabe1, Yoji Saito1 (Seikei Univ.1)

Keywords:テクスチャリング,ドライエッチング,太陽電池