[17a-PB4-1~21] 16.3 Bulk, thin-film and other silicon-based solar cells

[17a-PB4-4] The effects of firing process on electrical properties of SiN_x/Si structure

^○Yuya Enomoto¹, Toru Takayanagi¹, Haruhiko Yoshida^1,3, Kouji Arafune^1,3, Atsushi Ogura^2,3, Shinichi Satoh^1,3 (Univ. of Hyogo¹, Meiji Univ.², JST-CREST³)

Keywords:太陽電池,SiNx,ファイヤースルー