The 75th JSAP Autumn Meeting, 2014

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Poster presentation

16. Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[17a-PB4-1~21] 16.3 Bulk, thin-film and other silicon-based solar cells

Wed. Sep 17, 2014 9:30 AM - 11:30 AM PB4 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB4会場)

9:30 AM - 11:30 AM

[17a-PB4-7] Fabrication of Overdoze of hydrogen to a-Si:H Film by “Ion Beam Assist Method”

○Kazuki Miyama1, junpei Fukashi1, seiya Matsukawa1, Hiroshi Kubota1, Masao Yoshioka2, Souitirou Ootsu2 (Graduate school of Science and Technology Kumamoto Univ.1, Faculty of Technology Kumamoto Univ.2)

Keywords:a-Si:H,ion beam,水素化