[17a-S9-1~8] 3.7 Laser processing

[17a-S9-3] Effect of ripple formation on ablation threshold in submicron machning by a femto-second laser on Si surface

Ryo Sugawara¹, Yuki Sone¹, Shota Sekiguchi¹, Keita Ishizutsumi¹, ^○Takashi Yagi¹ (Tokai Univ.¹)

Keywords:Submicron meter macining,femto-second laser,ripple