The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[17p-A10-1~17] 6.3 Oxide-based electronics

Wed. Sep 17, 2014 1:15 PM - 5:45 PM A10 (E214)

1:15 PM - 1:30 PM

△ [17p-A10-1] Growth and characterization of TiOx films

○Kohei Yoshimatsu1, Takayoshi Oshima1, Akira Ohtomo1,2 (Tokyo Institute of Technology1, Material Research Center for Element Strategy2)

Keywords:酸化物薄膜,パルスレーザー堆積法