The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[17p-A10-1~17] 6.3 Oxide-based electronics

Wed. Sep 17, 2014 1:15 PM - 5:45 PM A10 (E214)

3:00 PM - 3:15 PM

△ [17p-A10-8] n-type or p-type SnOx films Deposited by Reactive Sputtering

○Saki Yonekawa1, Junjun Jia2, Gloess Daniel1, Yuzo Shigesato1 (Aogaku Univ.1, Fraunhofer Inst.2)

Keywords:反応性スパッタ法