[17p-A11-1~17] 6.4 New thin-film materials

[17p-A11-2] Properties of IrO_xH_ｙ film prepared by reactive sputtering using H₂O gas

^○Satoshi Ito¹, Yoshio Abe¹, Midori Kawamura¹, Kyung Ho Kim¹ (Kitami Inst. Tech¹)

Keywords:エレクトロクロミズム,反応性スパッタ,イリジウム酸化物