The 75th JSAP Autumn Meeting, 2014

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Symposium » Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

[17p-A14-1~12] Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

Wed. Sep 17, 2014 1:30 PM - 5:30 PM A14 (E305)

1:45 PM - 2:15 PM

[17p-A14-2] Electrochemical etching of III-V compound semiconductors for micro- and nanofabrications

○Taketomo Sato1, Yusuke Kumazaki1, Akio Watanabe1, Zenji Yatabe1 (RCIQE, Hokkaido Univ.1)

Keywords:半導体ナノ構造,多孔質構造,電気化学エッチング