The 75th JSAP Autumn Meeting, 2014

Presentation information

Symposium

Symposium » Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

[17p-A14-1~12] Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

Wed. Sep 17, 2014 1:30 PM - 5:30 PM A14 (E305)

2:45 PM - 3:00 PM

[17p-A14-4] Effect of viscoelasiticity of PVA brush on the friction

Toshiyuki Sanada1, Yoshitaka Hara1, Akira Fukunaga2, Hirokuni Hiyama2 (Shizuoka Univ.1, Ebara Coap.2)

Keywords:半導体洗浄