2:45 PM - 3:00 PM
[17p-A14-4] Effect of viscoelasiticity of PVA brush on the friction
Keywords:半導体洗浄
Symposium
Symposium » Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses
Wed. Sep 17, 2014 1:30 PM - 5:30 PM A14 (E305)
2:45 PM - 3:00 PM
Keywords:半導体洗浄