[17p-A19-1~12] Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

[17p-A19-10] Electron irradiation effect on Au induced lateral crystallization for amorphous Ge/SiO₂

^○(B)Kenta Moto¹, Shin Sakiyama¹, Hayato Okamoto¹, Takatsugu Sakai¹, Kazutoshi Nakashima¹, Hideyuki Hara², Hiroto Nishimura², Kenichiro Takakura¹, Isao Tsunoda¹ (KNCT¹, Bruker BioSpin²)

Keywords:金属誘起成長,低温形成,ゲルマニウム