The 75th JSAP Autumn Meeting, 2014

Presentation information

Symposium

Symposium » Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

[17p-A19-1~12] Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

Wed. Sep 17, 2014 1:15 PM - 5:45 PM A19 (E311)

5:00 PM - 5:15 PM

[17p-A19-10] Electron irradiation effect on Au induced lateral crystallization for amorphous Ge/SiO2

○(B)Kenta Moto1, Shin Sakiyama1, Hayato Okamoto1, Takatsugu Sakai1, Kazutoshi Nakashima1, Hideyuki Hara2, Hiroto Nishimura2, Kenichiro Takakura1, Isao Tsunoda1 (KNCT1, Bruker BioSpin2)

Keywords:金属誘起成長,低温形成,ゲルマニウム