[17p-A19-1~12] Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

[17p-A19-3] Atmospheric Pressure Plasma Crystallization and Single-crystalline Layer Transfer for High-performance Thin-Film Transistor Fabrication on Glass and Plastics

^○Seiichiro Higashi^1,2, Shohei Hayashi¹, Seiji Morisaki¹, Muneki Akazawa¹, Kouhei Sakaike¹ (Grad. School Adv. Sci. Matter, Hiroshima Univ.¹, Research Inst. Nanodevice Bio Systems, Hiroshima Univ.²)

Keywords:結晶化,TFT,プラズマ