The 75th JSAP Autumn Meeting, 2014

Presentation information

Symposium

Symposium » Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

[17p-A19-1~12] Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

Wed. Sep 17, 2014 1:15 PM - 5:45 PM A19 (E311)

4:00 PM - 4:30 PM

[17p-A19-7] Crystal orientation control of Ge thin films on amorphous substrates
by metal-induced layer exchange

Kaoru Toko1, Koki Nakazawa1, Naoki Oya1, Noritaka Usami2, Takashi Suemasu1 (Univ. of Tsukuba1, Nagoya Univ.2)

Keywords:ゲルマニウム,金属誘起成長,結晶方位制御