The 75th JSAP Autumn Meeting, 2014

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Oral presentation

17. Nanocarbon Technology » 17.2 Structural control and process

[17p-B1-4~15] 17.2 Structural control and process

Wed. Sep 17, 2014 2:00 PM - 5:15 PM B1 (Seminar1)

3:00 PM - 3:15 PM

[17p-B1-8] Fabrication of Micro Graphene Oxide Patterns by Applying VUV/O3 Etching

○(M2)Yudi Tu1, Om Prakash Khatri2, Takashi Ichii1, Toru Utsunomiya1, Hiroyuki Sugimura1 (Kyoto Univ.1, IIP2)

Keywords:Graphene,真空紫外光,微細加工