[17p-C7-1~15] 3.2 Materials and equipment optics

[17p-C7-3] Bending Technique of Planar Device for Manufacturing Curved Device Having Wavelength–Subwavelength Structure I

^○Shigeru Matsui¹, Takanori Aono², Yoshisada Ebata¹, Kenta Yaegashi¹ (Hitachi High-Technologies¹, Hitachi, HRL²)

Keywords:曲面素子,サブ波長構造,塑性変形