[17p-PA1-1~16] 13.3 Si Process・Interconnect・MEMS・Integration

[17p-PA1-1] Fabrication of nano-gap high-performance three-dimensional plasmonic metamaterial absorbers for uncooled infrared sensors with advanced functions III

^○Mitsuharu Uetsuki¹, Hisatoshi Hata¹, Koji Misaki¹, Shinpei Ogawa¹, Daisuke Fujisawa¹, Masafumi Kimata² (Mitsubishi Electric Corp.¹, Ritsumeikan Univ.²)

Keywords:赤外線センサ,plasmonics,metamaterial