The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[17p-PA1-1~16] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Sep 17, 2014 1:30 PM - 3:30 PM PA1 (Gymnasium1)

ポスター掲示時間13:30~15:30(PA1会場)

1:30 PM - 3:30 PM

[17p-PA1-1] Fabrication of nano-gap high-performance three-dimensional plasmonic metamaterial absorbers for uncooled infrared sensors with advanced functions III

Mitsuharu Uetsuki1, Hisatoshi Hata1, Koji Misaki1, Shinpei Ogawa1, Daisuke Fujisawa1, Masafumi Kimata2 (Mitsubishi Electric Corp.1, Ritsumeikan Univ.2)

Keywords:赤外線センサ,plasmonics,metamaterial