The 75th JSAP Autumn Meeting, 2014

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Poster presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[17p-PA1-1~16] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Sep 17, 2014 1:30 PM - 3:30 PM PA1 (Gymnasium1)

ポスター掲示時間13:30～15:30(PA1会場)

1:30 PM - 3:30 PM

△ [17p-PA1-12] Lateral growth of a-Si film by Soft X-ray crystallization

○Shota Hirano1, Fumito Kusakabe1, Akira Heya1, Naoto Matsuo1, Kazuhiro Kanda2 (Univ.of Hyogo1, LASTI Univ.of Hyogo2)

Keywords:軟X線,結晶化