The 75th JSAP Autumn Meeting, 2014

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Poster presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[17p-PA1-1~16] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Sep 17, 2014 1:30 PM - 3:30 PM PA1 (Gymnasium1)

ポスター掲示時間13:30～15:30(PA1会場)

1:30 PM - 3:30 PM

△ [17p-PA1-4] A Study of a Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers

○Shota Kamei1, Daisuke Yamane1, Toshifumi Konishi2, Takaaki Matsushima2, Hiroshi Toshiyoshi3, Katsuyuki Machida1,2, Kazuya Masu1 (Tokyo Inst. of Tech.1, NTT-AT2, Univ. of Tokyo3)

Keywords:CMOS-MEMS,加速度センサ,sub-1G