1:30 PM - 3:30 PM
[17p-PA1-8] Reactive plasma generation at gas-gas interface inside MEMS micro-channel
Keywords:大気圧プラズマ,マイクロ流路,ガス-ガス界面
Presentation information
Poster presentation
13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration
[17p-PA1-1~16] 13.3 Si Process・Interconnect・MEMS・Integration
Wed. Sep 17, 2014 1:30 PM - 3:30 PM PA1 (Gymnasium1)
ポスター掲示時間13:30～15:30(PA1会場)