The 75th JSAP Autumn Meeting, 2014

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Poster presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[17p-PA1-1~16] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Sep 17, 2014 1:30 PM - 3:30 PM PA1 (Gymnasium1)

ポスター掲示時間13:30～15:30(PA1会場)

1:30 PM - 3:30 PM

[17p-PA1-9] Continuous wave laser lateral crystallization with Multi-Line Beam

○Tatsuaki Hirata1, Shin-ichiro Kuroki1, Masayuki Yamano1, Tadashi Sato1, Kouji Kotani2, Takamaro Kikkawa1 (Hiroshima. Univ. RNBS1, Graduate School of Engineering, Tohoku. Uni.2)

Keywords:結晶化