[17p-PA4-1~15] 6.1/9.1 Code-sharing session

[17p-PA4-9] Aged deterioration of pulse poling on the piezoelectric property and microstructure of microfabricated PZT thin films

^○Natsumi Makimoto¹, Yasuhiro Suzuki^1,2, Ryutaro Maeda¹, Hiroshi Funakubo³, Takeshi Kobayashi¹ (AIST¹, Ibaraki Univ.², Tokyo Tech.³)

Keywords:PZT薄膜,圧電特性