Aged deterioration of pulse poling on the piezoelectric property and microstructure of microfabricated PZT thin films

Presentation information

Poster presentation

Code-sharing session » 6.1/9.1 Code-sharing session

Wed. Sep 17, 2014 4:00 PM - 6:00 PM PA4 (Gymnasium1)

ポスター掲示時間16:00～18:00(PA4会場)

4:00 PM - 6:00 PM

^○Natsumi Makimoto¹, Yasuhiro Suzuki^1,2, Ryutaro Maeda¹, Hiroshi Funakubo³, Takeshi Kobayashi¹ (AIST¹, Ibaraki Univ.², Tokyo Tech.³)

Keywords:PZT薄膜,圧電特性