Effect of vacuum annealing and positional dependence on electrical properties of NTO/GZO bilayer film

Presentation information

Poster presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Wed. Sep 17, 2014 4:00 PM - 6:00 PM PA5 (Gymnasium1)

ポスター掲示時間16:00～18:00(PA5会場)

4:00 PM - 6:00 PM

^○HIroki Kikuchi¹, Sota Inoue¹, Shuhei Funaki¹, Yasuji Yamada¹ (Shimadaisourikou¹)

Keywords:TCO,GZO,積層