The 75th JSAP Autumn Meeting, 2014

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Poster presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[17p-PA5-1~22] Nanocarbon Technology

Wed. Sep 17, 2014 4:00 PM - 6:00 PM PA5 (Gymnasium1)

ポスター掲示時間16:00～18:00(PA5会場)

4:00 PM - 6:00 PM

[17p-PA5-18] Improved Mobility of Ta:SnO2 Films at Low Substrate Temperature Using Seed Layer

○Shoichiro Nakao1,2, Naoomi Yamada3, Yasushi Hirose1,2,4, Tetsuya Hasegawa1,2,4 (KAST1, CREST2, Chubu Univ.3, Univ. of Tokyo4)

Keywords:酸化スズ